Pressure sensor element having an integrated sealing surface

摘要

The present invention relates to a sensor element for detecting pressures or forces. The sensor element ( 10 ) includes a sensor diaphragm ( 13 ), on the diaphragm outer side ( 20 ) of which piezoresistive measuring elements ( 8 ) are located. The sensor diaphragm ( 13 ) of the sensor element ( 10 ) is diametrically opposed to a sealing surface ( 15, 16 ) for sealing off the sensor element ( 10 ) from a housing. A force introduction region ( 23, 24 ) for introducing a force which produces a seal is mechanically decoupled from the sensor diaphragm ( 13 ) of the sensor element ( 10 ).