| 摘要 |
PROBLEM TO BE SOLVED: To provide a pulse gas laser oscillator that can prevent excessive currents from flowing in specific coiled electrodes 4b and 5b and requires no maintenance by increasing an average output and preventing damage to the surface of the electrode. SOLUTION: Main discharge electrodes 4 and 5 are provided with a plurality of supporting members 4a and 5a made of insulating material erected on base plates 2 and 3, respectively, and coiled electrodes 4b and 5b that are wound around the supporting members 4a and 5a while being opposite to each other. A spare ionization electrode 6 is provided on the base side of the coiled electrode 5a with an insulating member 7 interposed. A laser gas is distributed by a circulating means 25 through penetrating holes 4c and 5c formed in the base plates in the axial direction of the coiled electrode. Thus, the coiled electrodes 4b and 5b work as impedances to pulse currents, thereby preventing the excessive current from flowing. COPYRIGHT: (C)2005,JPO&NCIPI |
