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发明名称
Verfahren zur Überwachung von Bearbeitungsanlagen
摘要
申请公布号
DE59812798(D1)
申请公布日期
2005.06.16
申请号
DE19985012798
申请日期
1998.12.11
申请人
INFINEON TECHNOLOGIES AG
发明人
FEDERL, PETER;POEPPEL, DR.;WACHTMEISTER, FRANK
分类号
G05B23/02;(IPC1-7):G05B23/02
主分类号
G05B23/02
代理机构
代理人
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地址
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