发明名称 OPTICAL ELEMENT MOLDING DIE AND METHOD AND APPARATUS FOR PRODUCING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an optical element molding die which has a molding surface improved in adhesion to a film formed by ion implantation and a film-forming surface formed in a method different from that and having high adhesive strength. SOLUTION: The method for producing the optical element molding die comprises a first step (S01) of generating a plasma containing Pt ions being noble metal ions around the base material 2 set in a vacuum container 4, extracting only ions from the plasma around the base material 2 by applying a pulse voltage to the base material 2, and implanting the ions into the molding surface 2A of the base material 2 and a second step (S02) of forming a film comprising Pt on the molding surface 2A subjected to the first step (S01) by sputtering. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005154187(A) 申请公布日期 2005.06.16
申请号 JP20030393758 申请日期 2003.11.25
申请人 OLYMPUS CORP 发明人 TOJO HIROMI;HIJINO MASAMICHI;ISOGAWA SEIJI
分类号 C03B40/02;C03B11/08;C23C14/48;C23C14/58;C23C16/06;(IPC1-7):C03B40/02 主分类号 C03B40/02
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