METHOD FOR FORMING CARBON NANOTUBE EMITTER, AND MANUFACTURING METHOD OF FIELD EMISSION DISPLAY ELEMENT USING IT

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a carbon nanotube emitter.

SOLUTION: This method for forming carbon nanotube emitters includes: a step for forming a carbon nanotube layer on the whole of a substrate on which a plurality of electrodes are formed; a step for coating a photoresist on the upper surface of the carbon nanotube layer; a step for patterning the photoresist such that the photoresist only remains above the electrodes; a step for removing an exposed portion of the carbon nanotube layer by etching by using the patterned photoresist as an etching mask; and a step for removing the photoresist to form the carbon nanotube emitters on the electrodes.

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