发明名称 |
METHOD FOR MEASURING CONTOUR VARIATIONS |
摘要 |
A method for measuring a contour variation of a measuring area on an object. The method includes the steps of: irradiating the measuring area with a light beam, wherein reflection or transmission of the beam occurs; splitting the transmitted or reflected beam; combining the split beams with each other and observing a fringe pattern representing a differential phase between the split beams; varying the phase of the split beams relative to each other, such that the differential phase is kept within the range of 2 pi; calculating an optical path length difference from the differential phase; and relating the optical path length difference to the contour variation of the object. |
申请公布号 |
EP1540271(A1) |
申请公布日期 |
2005.06.15 |
申请号 |
EP20030795501 |
申请日期 |
2003.09.12 |
申请人 |
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO |
发明人 |
SAUNDERS, IAN;VAN BRUG, HEDSER;KORPERSHOEK, JACOBUS, JOHANNES |
分类号 |
G01B9/02;G01B11/24;(IPC1-7):G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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