| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing quartz glass in which the in-plane distribution of OH groups is uniform and which has excellent internal quality by using inexpensive equipment by sintering a very brittle soot having high purity without being contaminated or broken. SOLUTION: The method for producing the quartz glass is characterized by sintering a quartz glass preform by heating it with microwave in a vessel having a heat insulating material. A preferable dielectric constant of the heat insulating material is≤10, and a suitable frequency of the microwave is≥28 GHz. The quartz glass of this invention is characterized by being produced by such a method. COPYRIGHT: (C)2005,JPO&NCIPI
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