| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power source circuit for a plasma reactor enhancing energy efficiency in the plasma reactor, and a power source control method for a plasma reactor. <P>SOLUTION: The power source circuit 10 for the plasma reactor has a voltage measurement part 14 and a current measurement part 16 for measuring a voltage and a current fed to the plasma reactor; and a control means 18 for calculating a thrown power amount from the measured voltage value and the current value to the plasma reactor and feedback-control the high voltage power source such that the required power amount required in the plasma reactor is fed to the plasma reactor based on the thrown power amount. The power source control method for the plasma reactor includes a process for calculating the thrown power amount from the measured voltage value and the current value to the plasma reactor; and a process for feedback-controlling the high voltage power source such that the required power amount is fed to the plasma reactor based on the calculated thrown power amount. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
