| 摘要 |
PROBLEM TO BE SOLVED: To improve bonding force between green sheets and also to easily peel the green sheet and a temporary base material. SOLUTION: The green sheet 331 is deposited with pressure on a laminated green sheet material 330 while the ultrasonic wave is applied using an ultrasonic wave head unit 120. With the ultrasonic wave, organic binders are bonded with each other owing to friction heat at the surfaces where the green sheets 331 are bonded with each other. Since acoustic impedances are different with each other in the green sheet 331 having the soft property and the temporary base material 340 having the hard property, the bonding force is lowered by applying the ultrasonic wave and thereby the temporary base material can be peeled off easily from the green sheet. COPYRIGHT: (C)2005,JPO&NCIPI |
