| 摘要 |
PROBLEM TO BE SOLVED: To provide an image composition method by which high accuracy and efficiency are attained in composing images. SOLUTION: The image composition method comprises: measuring two reference points by means of an EMI (Electromagnetic Interference) tester 1 in a state of marking the two reference points on a substrate 20 to be measured; displaying a radiation distribution image 30 with the positions of the reference points displayed as points D1, D2 by the measured data on a monitor 10; photographing the substrate 20 on a digital camera; and displaying the photographed image with the positions of the points displayed as the reference points P1, P2 on the monitor 10. Clicking each reference point on the image on the monitor 10 inputs the coordinate value of the points D1, D2 of the radiation distribution image 30 displayed on the image on the monitor 10 and that of the points P1, P2 of the photographed image of the substrate 20 to implement an image composition program 100. A scale value and an offset amount are calculated from the coordinate value of the points D1, D2 and that of the points P1, P2. The photographed image 40 of the substrate 20 is allowed to agree to the radiation distribution image 30 based on the calculated and obtained scale value and offset amount for displaying as a composite image. COPYRIGHT: (C)2005,JPO&NCIPI |
