| 摘要 |
PROBLEM TO BE SOLVED: To accurately carry a treated substrate by a substrate transfer device by accurately grasping a position of a boat (treated substrate) even if the temperature inside an airtight chamber changes. SOLUTION: The semiconductor manufacturing device has a reaction chamber for storing and treating a substrate, a boat for holding the substrate, a boat supporting means for supporting the boat, and a boat elevator for elevating the boat together with the boat supporting means and inserts the boat into the reaction chamber. A distance measuring means for measuring a distance in non-contact is fixed to the device, the distance between the distance measuring means and the boat supporting means is measured by using the distance measuring means and the position of the boat is detected from the measured distance. COPYRIGHT: (C)2005,JPO&NCIPI
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