| 摘要 |
PROBLEM TO BE SOLVED: To control the profile of laser beams in a surface to be irradiated variably using a homogenizer. SOLUTION: A homogenizer 3 divides an incident laser beam L into plural lines of laser beams as to positions in the cross section of the beams and also superposes the divided plural lines of laser beams on a common area in a face 5 to be irradiated. A profiler 6 measures profile data 61 expressing a profile equivalent to the profile in the face 5 to be irradiated of the laser beams superposed by the homogenizer 3. A controller 7 controls the beam width of the incident laser beam L using a movable expander 2 based on the profile data 61. Then, the profile on the face 5 to be irradiated is changed by the beam width of the incident laser beam L. COPYRIGHT: (C)2005,JPO&NCIPI
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