| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ozone-decomposable novolac resin which is superior in ozone decomposability and preferably usable as a resist at the time of manufacturing a semiconductor substrate, a liquid crystal sustrate and the like, and a resist composition containing the ozone-decomposable novolac resin. <P>SOLUTION: The ozone-decomposable novolac resin has repeating units having a structure in which two benzene rings are bonded to each other with a group having an aliphatic double bond. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
