| 摘要 |
PROBLEM TO BE SOLVED: To prevent external vibration from adversely affecting measured values by a simple, inexpensive structure in a measuring apparatus. SOLUTION: A sensor section 103 is fixed to a column 104 by allowing a clamp device 107 to hold a fixing member. With the positional relationship in the height direction between an object to be measured on an XY stage 102 and the sensor section 103 fixed, the sensor section 103 measures the size of the object to be measured. COPYRIGHT: (C)2005,JPO&NCIPI
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