| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for discharging liquid metal ions wherein a metal ion discharging area can be made extremely small and a structure in which a flow to an ion discharging part of the liquid metal cannot be easily influenced by a vacuum environment, etc., and to provide an ion beam irradiation device provided with the device for discharging the liquid metal ions, a processing unit provided with the ion beam irradiation device, an analyzer and a manufacturing method for discharging the liquid metal ions. SOLUTION: This device for discharging the liquid metal ions discharges the metal ions by applying a voltage to a melted liquid metal, and has a needlelike part (5) with a pore wherein the liquid metal can move. The needlelike part (5) has a first opening for supplying the liquid metal into the pore and a second opening part for discharging the liquid metal as the metal ion. COPYRIGHT: (C)2005,JPO&NCIPI
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