| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of microlens for forming a heat-resistant microlens. SOLUTION: The method includes a step of forming an inorganic light-transmissive film on a substrate, a step of forming a resist film on a position corresponding to a lens forming position on the inorganic film, a step of etching the part with no resist film formed of the inorganic film, a step of removing the remaining resist film, and a step (F) of the inorganic film where the resist film is removed and which is patterned by etching being irradiated with inactive gaseous ion. COPYRIGHT: (C)2005,JPO&NCIPI
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