METHOD FOR MANUFACTURING QUARTZ POROUS PREFORM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a quartz porous preform in which fluorine is added in a good yield. SOLUTION: The method for manufacturing the quartz porous preform comprises depositing glass particulates on a starting material while regulating the supply amounts of a gas A and a gas B to be supplied to a burner so that the ratio of the number of fluorine atoms to the number of silicon atoms in the gases to be supplied to the burner satisfies formula (1): ä(the number of fluorine atoms)/(the number of silicon atoms)}≤0.1 when the glass particulates are directly deposited on the starting material. COPYRIGHT: (C)2005,JPO&NCIPI