WAFER INSPECTION DEVICE

摘要

The invention relates to a wafer inspection device (1). Said device comprises an air-cushioned table (2), which can be displaced in two directions (X,Y) that are perpendicular to one another. Several air nozzles (12, 14) are provided for this purpose. At least one valve (29) is connected to at least one electric control unit (27), said valve (29) being configured in such a way that a normal pressure prevails in the air nozzles (12, 14), when the electric control unit (27) delivers a corresponding signal.