摘要 |
The invention relates to a cryogenic refrigerator comprising at least two refrigeration stages (KS1, KS2), each of which contains an expansion pipe (10, 20) and a regenerator (12, 22). The first refrigeration stage (KS1) generates a preliminary cooling and the second refrigeration stage (KS2) a secondary cooling. The compressed gas that is delivered by a compressor (27) is fed to the refrigeration stages by means of a valve device (30.) Separate conduits (31, 32) lead from said device to the refrigeration stages. The valve device is configured in such a way that it defines different times for the inflow and/or outflow of process gas. This permits a decoupling of both refrigeration stages. |