SYSTEMS AND METHODS FOR MASTERING MICROSTRUCTURES THROUGH A SUBSTRATE USING NEGATIVE PHOTORESIST AND MICROSTRUCTURE MASTERS SO PRODUCED

摘要

Microstructures (132) are fabricated by impinging a radiation beam (120), such as a laser beam, through a substrate that is transparent to the laser beam, into a negative photoresist layer (110) on the substrate. The negative photoresist layer may be subsequently developed to provide a master for optical and/or mechanical microstructures. Related systems, microstructure products and microstructure masters also are disclosed.