发明名称 Layout method of voltage division resistors
摘要 With a layout method for voltage division resistors, employing a photolithographic system, resistors which are required to have relative accuracy are disposed in the center of a layout area so as to be adjacent with each other, and another resistor is divided, so that divided portions thereof are disposed on the outer side of the resistors maintaining high accuracy, respectively, ends of the divided portions, positioned on the opposite sides of the voltage division resistors, respectively, being connected with each other.
申请公布号 US6904583(B2) 申请公布日期 2005.06.07
申请号 US20020252675 申请日期 2002.09.24
申请人 OKI ELECTRIC INDUSTRY CO., LTD. 发明人 HIROHATA FUKUICHI
分类号 H01L27/04;G02F1/133;H01C3/12;H01L21/822;H01L27/08;(IPC1-7):G06F17/50 主分类号 H01L27/04
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