MICROFLUID EJECTION DEVICE HAVING EFFICIENT LOGIC AND DRIVERCIRCUITRY

摘要

A semiconductor substrate (16) for a microfluid ejection head (14). The substrate includes a plurality of fluid ejection actuators (30) disposed on the substrate. A plurality of driver transistors (58) are disposed on the substrate (16) for driving the plurality of fluid ejection actuators (30). Each of the driver transistors (58) have an active area (94) ranging from about 1000 to less than about 15,000 micrometer square. A plurality of logic circuits (44) including at least one logic transistor (52) are coupled to th e driver transistors (58). The driver and logic transistors are provided by a high density array of MOS transistors wherein at least the logic transistors have a gate length of from about 0.1 to less than about 3 microns.