| 摘要 |
PROBLEM TO BE SOLVED: To provide a load sensor and a manufacturing method for the load sensor, allowing formation of even one resistor on various substrates each having a different thermal expansion coefficient, shape, thickness or the like. SOLUTION: This load sensor comprises: a substrate 1; a glass layer 2 formed on the substrate 1; a plurality of wiring lines 4 formed on the glass layer 2; and the resistor 5 formed such that the resistor 5 is connected to the plurality of wiring lines 4. An adjustment layer 3 is formed between the glass layer 2 and the resistor 5. Thereby, stress easy to generate inside the resistor 5 when baking and forming the resistor 5 can be reduced to stabilize properties of the resistor 5. COPYRIGHT: (C)2005,JPO&NCIPI
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