| 摘要 |
PROBLEM TO BE SOLVED: To provide a bipolar electrostatic chuck which is capable of markedly reducing leakage current that flows through a dielectric substance, when it picks up a work. SOLUTION: The electrostatic chuck is composed of an insulator base and a plurality of dielectric substances each of which is unipolar, The bipolar electrostatic chuck is equipped with the adjacent dielectric substances which are insulated from each other by an insulator that has surface resistance higher than that of the dielectric substance. The whole certain pole dielectric substance of the unipolar dielectric substances is lower than the adjacent insulator, and the level difference induced between the certain pole dielectric substance and the adjacent insulator is filled up with an insulator having a surface resistance higher than that of the dielectric substance for the formation of an electrostatic chuck. COPYRIGHT: (C)2005,JPO&NCIPI |
