| 摘要 |
PROBLEM TO BE SOLVED: To provide a purge unit that is capable of controlling a water volume below a reference value, and its manufacturing method. SOLUTION: The purge unit 1A keeps a manual valve 3, a regulator 4, a pressure meter 5, an opening and closing valve 6, a mass flow controller 7, and a filter 8 connected with one another and supplies a working gas from an input port 15 to an output port 16 via the above-mentioned devices. In the purge unit 1A, the water volumes inside fluid control devices including the manual valve 3 and the regulator 4 are set below the reference value and further the input port 15 and the output port 16 are sealed by a sealing member 17, 17. COPYRIGHT: (C)2005,JPO&NCIPI
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