Production of microscopic and nanoscopic coils, transformers and capacitors by rolling or folding over conductive layers during the removal of auxiliary layers from a substrate

摘要

Production of microscopic and nanoscopic coils, transformers and capacitors by rolling up conductor layers during the removal of auxiliary layers from a substrate By removing the auxiliary layer ( 3 ) from the substrate ( 1 ), for example by virtue of a sacrificial layer ( 2 ) situated in between being selectively etched away, the auxiliary layer ( 3 ) folds back and, if appropriate, automatically rolls up upon continuation of the removal operation and a conductor track ( 4 ) concomitantly rolls up in the process. The auxiliary layer ( 3 ) may be formed by two layers ( 3 a, 3 b) having different lattice constants. It is possible to produce microcoils, microtransformers or microcapacitors constructed from said microcoils, with diameters in the nanometers or micrometers range.