发明名称 |
ANTIREFLECTIVE COATINGS FOR VIA FILL AND PHOTOLITHOGRAPHY APPLICATIONS AND METHODS OF PREPARATION THEREOF |
摘要 |
An absorbing composition is described herein that includes at least one inorganicbased compound, at least one absorbing compound, and at least one material modification agent. In addition, methods of making an absorbing composition are also described that includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, an acid/water mixture, and one or more solvents to form a reaction mixture; and b) allowing the reaction mixture to form the absorbing composition at room temperature. Another method of making an absorbing composition includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, an acid/water mixture, and one or more solvents to form a reaction mixture; and b) heating the reaction mixture to form the absorbing composition. Yet another method of making an absorbing composition is described that includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, and one or more solvents to form a reaction mixture, wherein the at least one material modification agent comprises at least one acid and water; and b) heating the reaction mixture to form an absorbing material, a coating or a film. In other methods of making an absorbing composition described herein, those methods include: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, and one or more solvents to form a reaction mixture, wherein the at least one material modification agent comprises at least one acid and water; and b) allowing the reaction mixture to form an absorbing material, a coating or a film. |
申请公布号 |
WO2005049681(A2) |
申请公布日期 |
2005.06.02 |
申请号 |
WO2004US38517 |
申请日期 |
2004.11.17 |
申请人 |
HONEYWELL INTERNATIONAL INC.;LI, BO;KENNEDY, JOSEPH;IWAMOTO, NANCY;LU, VICTOR;LEUNG, ROGER;FRADKIN, MARK, A.;HUSSEIN, MAKAREM, A.;GOODNER, MICHAEL, D. |
发明人 |
LI, BO;KENNEDY, JOSEPH;IWAMOTO, NANCY;LU, VICTOR;LEUNG, ROGER;FRADKIN, MARK, A.;HUSSEIN, MAKAREM, A.;GOODNER, MICHAEL, D. |
分类号 |
C08G;C08L83/04;C09D183/04;C09D183/08;G03F7/09 |
主分类号 |
C08G |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|