| 发明名称 |
CRYOPUMP |
| 摘要 |
<p>A cryopump in which the volume of gas absorbed is increased without increasing the size of the cryopump by providing tubular panels (41, 42) having a surface parallel with the inflow direction of gas at the gas inflow section through which gas flows from a vacuum chamber (8) into a cryopanel (34).</p> |
| 申请公布号 |
WO2005050017(A1) |
申请公布日期 |
2005.06.02 |
| 申请号 |
WO2004JP17016 |
申请日期 |
2004.11.16 |
| 申请人 |
SUMITOMO HEAVY INDUSTRIES, LTD.;TANAKA, HIDEKAZU |
发明人 |
TANAKA, HIDEKAZU |
| 分类号 |
F04B37/08;(IPC1-7):F04B37/08 |
主分类号 |
F04B37/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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