| 摘要 |
PROBLEM TO BE SOLVED: To raise the scanning speed of a tube scanner, to make the tube scanner compact, and to make a scanning probe microscope compact by using the tube scanner made compact for the scanning probe microscope. SOLUTION: The tube scanner is provided with a cylindrical piezoelectric element; a node dividing the piezoelectric element in its longitudinal direction; and a voltage impressing means for impressing a voltage on the piezoelectric element on both sides of the node. The scanning probe microscope is provided with a sample, a probe opposed to the sample; and a tube scanner for two-dimensionally relatively scanning the sample and the probe and changing the distance between the sample and the probe and displays images on the basis of a signal detected by physical quantities acting between the probe and the sample. In the scanning probe microscope, the tube scanner is the above-mentioned tube scanner. COPYRIGHT: (C)2005,JPO&NCIPI
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