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发明名称
MAPPING ELLIPSOMETER
摘要
申请公布号
KR20050051415(A)
申请公布日期
2005.06.01
申请号
KR20030085200
申请日期
2003.11.27
申请人
HANYANG HAK WON CO., LTD.
发明人
AN, IL SIN;OH, HYE KEUN
分类号
(IPC1-7):G01B11/30
主分类号
(IPC1-7):G01B11/30
代理机构
代理人
主权项
地址
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