METHOD FOR CARRYING OBJECT TO BE PROCESSED

摘要

A method for carrying an object to be processed used for a processing apparatus which comprises a plurality of process chambers including a specific process chamber for a process in which the object in process is easily contaminated and a carrying mechanism having two picks. The method includes a plurality of carrying steps wherein the object in process is sequentially carried from one chamber to another among the plurality of process chambers. One of the two picks is used in carrying steps right before carrying the object into the specific process chamber, and the other pick is used in the step of carrying the object into the specific process chamber and the later carrying steps.