Quantitative biopolymer detecting system using monolithic piezoelectric cantilever by resonant frequency shift, method for fabricating the same system and method for detecting biopolymer quantitatively using the same system

摘要

A method for detecting a small amount of biopolymer by using resonant frequency shift of PZT monolithic cantilever system using a cantilever includes: an infinitesimal fluid transfer system having an inlet for allowing a reactant to be injected therethrough and an infinitesimal introduction channel for connecting the inlet and a reaction chamber; and a cantilever sensor installed in the reaction chamber and having a cantilever with one end fixed at a substrate, a piezoelectric capacitor for self-sensing and actuating on at least one side of an upper surface and a lower surface of the cantilever including a piezoelectric film, a lower electrode formed at a lower surface of the piezoelectric film and an upper electrode formed at an upper surface of the piezoelectric film, an electric pad for applying electricity to the lower electrode and the upper electrode, and a molecular recognition layer formed at at least one surface of the cantilever and so as to interact to an target biopolymer. Actuating and sensing can be applied to the cantilever using monolithic PZT cantilever without using an additional external actuator, so that the size of the cantilever sensor can be considerably reduced and coupled to a fine fluid transfer system to measure a very small amount of biopolymer.