| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape detection device capable of shortening the detection processing time. SOLUTION: The dove prism 17 is arranged in such a manner that the reversing center line R of the incident surface, and outgoing radiation surface 17A, 17B is inclined by 45°to the linear image I1 formed on the surface P in a direction along the light axis LC. In the case where the incident surface 17A is seen head-on, the light image I2 formed virtually on the incident surface 17A is inclined to the reversing center line R by the angle of 45°, and so when the outgoing radiation surface 17B is seen from the incident surface 17A side, the virtually formed light image I3 on the outgoing radiation surface 17B is turned to the light image I2 formed on the incident surface 17A by the angle of 90°. COPYRIGHT: (C)2005,JPO&NCIPI
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