AUTOMATIC CONVEYANCE VEHICLE, AND AUTOMATIC CONVEYANCE SYSTEM AND AUTOMATIC CONVEYANCE METHOD USING THE SAME, AND MANUFACTURING METHOD OF FLAT PANEL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a new automatic conveyance vehicle in which a conveyance object can be cooled.

SOLUTION: The automatic conveyance vehicle 10 is used for automatically conveying the conveyance objects P, from a loading position to a discharge position. The automatic conveyance vehicle 10 is provided with a conveyance vehicle body 11, a conveyance object loading part 13 disposed in the conveyance vehicle main body 11, and a cooling means 19 which are arranged in the conveyance vehicle body 11 and cool the conveyance objects P loaded on the conveyance object loading part 13.

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