发明名称 |
Specimen inspection apparatus and reference value setting unit and method of the specimen inspection apparatus |
摘要 |
A reference value setting unit of a specimen inspection apparatus comprises a calibration specimen, a calibration light source for emitting a predetermined light to the calibration specimen, at least one detector for receiving a first light-scattering signal reflected through the calibration specimen as well as a second light-scattering signal reflected from an inspection specimen, and a detector calibration unit for comparing a measured value measured from the calibration specimen with a reference value for the detector, and for calculating an offset value for calibration based on the comparison to calibrate the detector.
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申请公布号 |
US2005111004(A1) |
申请公布日期 |
2005.05.26 |
申请号 |
US20040916735 |
申请日期 |
2004.08.11 |
申请人 |
KIM BYOUNG-CHUL;YANG DUCK-SUN;JUNG HO-HYUNG;KIM YOUNG-GIL |
发明人 |
KIM BYOUNG-CHUL;YANG DUCK-SUN;JUNG HO-HYUNG;KIM YOUNG-GIL |
分类号 |
G01N21/93;G01N15/02;G01N15/10;G01N21/47;G01N21/95;G01N21/956;H01L21/66;(IPC1-7):G01N21/47 |
主分类号 |
G01N21/93 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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