TESTPIECE COOLING SYSTEM OF FOCUSED ION BEAM APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a testpiece cooling system of a focused ion beam apparatus, which has a simple structure and an excellent cooling effect. SOLUTION: A specimen cooling system of a focused ion beam apparatus includes: a reaction chamber 21; a stage 22 which is installed in the reaction chamber 21; a testpiece holder 24 which is installed over the stage 22 and on which a testpiece 25 is placed; a heat transfer member 26 which is attached to the testpiece holder 24 and extends from the interior of the reaction chamber 21 to the outside so as to transfer heat, which is generated in the testpiece 25 during a micromachining process performed by the focused ion beam apparatus, to the outside of the reaction chamber 21; and a heat sink 28 which is connected to the heat transfer member 26 extending to the outside of the reaction chamber 21 and absorbs heat transferred by the heat transfer member 26. COPYRIGHT: (C)2005,JPO&NCIPI