ELECTRODE SUBSTRATE AND ITS MANUFACTURING METHOD, AND CHARGED BEAM EXPOSURE DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To realize stable electric contact and to make a charge-up to hardly occur in an exposure device for performing pattern drawing by using a plurality of charged beams. SOLUTION: The electrode substrate includes a substrate 110 having a through hole 120, the electrode 130 installed on the side wall of the through hole, and wiring 140 for applying a voltage to the electrode. The wiring is brought into contact with the back surface 130b of a surface opposed to the through hole of the electrode. An insulator film 160 is provided on at least the part of a portion formed along the front surface of the substrate of the wiring. A conductor film 170 is provided on the insulator film, and this conductor film is electrically grounded. COPYRIGHT: (C)2005,JPO&NCIPI