| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing device, a quality determination reference setting device, a testing method and a test program capable of detecting highly sensitively and reliably abnormality in a static electric power source current value by taking dispersion in a process condition into account. SOLUTION: This device/method is provided with a CPU 10, an input part 30, a measuring part 40, an output part 60 and a storage part 100. The storage part 100 is provided with a measuring point storage area 11, a sample measuring data storage area 12, a quality determination reference storage area 13, a measuring condition storage area 14, a measuring data storage area 15, and a quality determination result storage area 17. The CPU 10 is provided with the quality determination reference setting device 20 provided with a measuring point grouping part 1 for setting a measuring point group based on the static electric power source current value, an optimum weighted mean value calculating part 2 for calculating a weighted mean value where the sum of dispersions in the static electric power source current values gets minimum in the measuring point group, a dispersion calculating part 3 for calculating the maximum value of the dispersions in the static electric power source current values, based on the weighted mean value, and a quality determination reference setting 4, and a quality determination part 50. COPYRIGHT: (C)2005,JPO&NCIPI
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