| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a quartz porous material, by which the quartz porous material in which fluorine is uniformly added in a low concentration can be manufactured in a relatively short time, a method for manufacturing a quartz glass preform, which comprises using the quartz porous material manufactured by the same, and the quartz glass preform in which fluorine is uniformly added in a low concentration. <P>SOLUTION: In the method for manufacturing the quartz porous preform, comprising supplying a fuel gas for preparing an oxyhydrogen flame to a burner 2 for synthesizing glass, at the same time, synthesizing quartz fine particles by supplying a gas A containing silicon and a gas B containing fluorine, and depositing the quartz fine particles on a starting member 1, the quartz fine particles are deposited on the outer peripheral part 11 of the starting member 1 while periodically swinging an area blasted with the quartz fine particles in the outer peripheral part 11 of the starting member 1. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
