HEATER AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a heater in which the surface roughness of a protective film is maintained lower than a predetermined value and the insulating withstand voltage is further raised. SOLUTION: This heater comprises a heat element 12 formed on a heat resisting insulative substrate 11 and having two belt-shaped portions extending in parallel and a coupling portion for coupling one ends of these belt-shaped portions to each other; and a protective film 14 for covering the heat element 12, the protective film 14 being formed of glass blended with Al2O3powder having the average particle diameter of 0.5-2.0μm by 3-40 wt.%. COPYRIGHT: (C)2005,JPO&NCIPI