Abrasive liquid for metal and method for polishing,申请号KR20047006306-传众专利搜索

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发明名称	Abrasive liquid for metal and method for polishing
摘要
申请公布号	KR100491465(B1)	申请公布日期	2005.05.25
申请号	KR20047006306	申请日期	1999.08.31
申请人		发明人
分类号	H01L21/304;C09G1/02;C23F3/00;C23F3/06;H01L21/321;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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