Drive mechanism and exposure apparatus having the same

摘要

Disclosed is a moving mechanism which includes a reference structure having a guide surface (6), a movable portion (3) being movable along the guide surface, and an actuator (8) having a movable element (2) disposed at the movable portion side and at least two stators (1,1'), the stators being separated from each other and being moved by a reaction force produced as the movable portion is driven.