CONTROLLING THE CHARACTERISTICS OF RIBBON-SHAPED IMPLANTER ION-BEAMS,申请号EP20030764775-传众专利搜索

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发明名称	CONTROLLING THE CHARACTERISTICS OF RIBBON-SHAPED IMPLANTER ION-BEAMS
摘要
申请公布号	EP1532650(A1)	申请公布日期	2005.05.25
申请号	EP20030764775	申请日期	2003.07.17
申请人		发明人
分类号	H01J37/141;H01J37/08;H01J37/14;H01J37/147;H01J37/315;H01J37/317;H01L21/425;(IPC1-7):H01J37/317	主分类号	H01J37/141
代理机构		代理人
主权项
地址

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