Use of light emitting chemical reactions for control of semiconductor production processes

摘要

A low-pressure processing vessel ( 3 ) used for the production of semiconductors is provided with a light-sensitive detector ( 1 ) at a distance from the reaction site, for example in the exhaust line ( 2 ). The detector ( 1 ) is used to detect light emitted by an intermediate which relaxes or recombines with the emission of light at a characteristic wavelength, the intermediate having a long lifetime such that the detector ( 1 ) can be positioned in a relatively remote location.