| 摘要 |
PROBLEM TO BE SOLVED: To provide a self-diagnosis acceleration sensor of electrostatic capacity sensing type capable of self-diagnosis, which is capable of miniaturizing the sensor elements, without the need for switching between an acceleration sensing circuit and a self-diagnostic drive circuit. SOLUTION: The self-diagnosis capable acceleration sensor of electrostatic capacity sensing type comprises movable electrodes on a rectangular diaphragm 2, fixed electrodes X, Y, Z on a base insulating substrate 3, and a weighting body 1 made to contact or form in one piece with the rectangular diaphragm, is provided with: a sensing circuit 4 for detecting the electrostatic variation between the movable electrodes and the fixed electrodes caused by acceleration; electrode 2-1, 2-2 for self-diagnosis in the field which counters a weighting body via insulator 2-3 and 2-4 in the domain over two sides on a diaphragm outer frame which adjoin each other at at least the corner part of the diagonal position of a pair; an electrode which faces the self-diagnostic electrodes on the weighting body; and a self-diagnosis drive circuit which gives the static electricity force between the electrode for diagnosis and the electrode provided in the weighting body. COPYRIGHT: (C)2005,JPO&NCIPI
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