| 摘要 |
PROBLEM TO BE SOLVED: To restrain detection sensitivity of elimination gas from getting low resulting from a temperature change of the gas introduced into a measuring chamber to obtain a precise detection result. SOLUTION: This analyzer is provided with a sample chamber 1 for arranging a sample S, an infrared heating furnace 2 for heating the sample S arranged in the sample chamber 1, the measuring chamber 3 introduced with the gas desorbed from the sample S by the heating, a turbo molecular pump 4 for pressure-reducing an inside of the measuring chamber 3, a mass spectrometer 5 arranged with a gas detecting part 5a inside the measuring chamber 3, an intermediate pressure-reduction chamber 6 provided between the sample chamber 1 and the measuring chamber 3, the first orifice 7 communicating the intermediate pressure-reduction chamber 6 with the sample chamber 1, and the second orifice 8 communicating the intermediate pressure-reduction chamber 6 with the measuring chamber 3, and the desorbed gas generated in the sample chamber 1 is introduced into the measuring chamber 3 via the first orifice 7, the intermediate pressure-reduction chamber 6 and the second orifice 8. Pressure is controlled in the intermediate pressure-reduction chamber 6 to make pressure constant in the measuring chamber 3. COPYRIGHT: (C)2005,JPO&NCIPI
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