Porous silicon substrate, for chromatography and biomolecule synthesis and filtration, has a primary structure of macro pores and a secondary structure of meso pores in the macro pore side walls

摘要

The porous silicon substrate (10) has macro pores (20) at least in zones as a porous primary structure from the upper to the lower sides. Meso pores (30) are in the side walls of the macro pores, forming a secondary porous structure. The macro pores have a diameter of 0.3-30.0 Microm and the meso pores have a diameter of 3-300 nm.