| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor light receiving element which is excellent in high-speed response characteristics and capable of detecting light appropriately. SOLUTION: The semiconductor light receiving element PD1 is equipped with a light receiver 11, a first pad electrode arrangement 21, and a second pad electrode arrangement 31. A recess 13 is provided on the top of a light receiver 11 and formed into a grooved shape so as to reach a high-concentration layer 3a surrounding a light receiver 9. A contact electrode 17 is arranged on the bottom of the recess 13. A second pad electrode 33 is arranged on a passivation film 19 located on the top of the second pad electrode arrangement 31. One end of a second wiring electrode 45 is connected to the contact electrode 17 through a contact hole 19a bored in the passivation film 19, and the other end is connected to a second pad electrode 33. By this setup, a high-concentration carrier layer 3a is electrically connected to the second pad electrode 33 through the contact electrode 17 and the second wiring electrode 45. COPYRIGHT: (C)2005,JPO&NCIPI
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