GAS-LIQUID SEPARATION MEMBRANE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a gas-liquid separation membrane composed of two silicon boards joined without an organic adhesive and a method of manufacturing the membrane. SOLUTION: The membrane 10 has a first silicon board 13 having an insulation film, or a silicon oxide film 12a, a glass film 14 in contact with the insulation film of the board 13 and a second silicon board 15 in contact with the film 14. The first and second boards 13 and 15 have through holes 16 and 17, respectively. The film 14 is made so that the holes 16 and 17 of the boards are intercommunicated and gas-permeable holes 18 allowing gases to permeate selectively are formed. COPYRIGHT: (C)2005,JPO&NCIPI