| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure planar shape without being affected by motion error of moving mechanism when scan-measuring a plane to be tested with an interferometer. SOLUTION: When a planar shape in a region exceeding a measuring region corresponding to the opening diameter of the interferometer is measured by relatively moving a specimen 10 having a plane to be tested and the interferometer 14 for measuring the planar shape with a moving mechanism (X slider 18, Y table 12) in a direction parallel to the tested plane, and measuring in turn the tested plane gradually shifting the measuring position with the interferometer, and connecting each obtained measured result, the displacements to each reference level of reference meters 24, 22 placed on a meteorology frame 20 supported independently of the specimen and the interferometer are measured with displacement sensors 28, 26 each supported in a specific relation to the specimen 10 and the interferometer 14 as motion error of the moving mechanism for each measuring position. When each measured result is connected, compensation is done based on the motion error measured at the particular position. COPYRIGHT: (C)2005,JPO&NCIPI
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